Title :
A CMOS potentiostat for control of integrated MEMS actuators
Author :
Prakash, Somashekar Bangalore ; Abshire, Pamela ; Urdaneta, Mario ; Christophersen, Marc ; Smela, Elisabeth
Author_Institution :
Dept. of Electr. & Comput. Eng., Maryland Univ., College Park, MD
Abstract :
We describe a potentiostat designed for in situ electrochemical control of MEMS actuators. This module is tailored for integration into a hybrid CMOS-MEMS system-on-a-chip to confine cells and measure signals from them. The design has been fabricated in a commercially available 0.5 mum CMOS process. The fabricated chip has been employed for the control of off-chip electroactive polymer films and micro-actuators
Keywords :
CMOS integrated circuits; integrated circuit design; microactuators; polymer films; 0.5 micron; CMOS potentiostat; electrochemical control; integrated MEMS actuators; off-chip electroactive polymer films; Actuators; Biosensors; Circuits; Educational institutions; Electrodes; Mechanical sensors; Micromechanical devices; Microstructure; Prototypes; Semiconductor device measurement;
Conference_Titel :
Circuits and Systems, 2006. ISCAS 2006. Proceedings. 2006 IEEE International Symposium on
Conference_Location :
Island of Kos
Print_ISBN :
0-7803-9389-9
DOI :
10.1109/ISCAS.2006.1693893
