DocumentCode
2557119
Title
Millinewton force sensor based on low temperature co-fired ceramic (LTCC) technology
Author
Birol, Hansu ; Maeder, Thomas ; Boers, Marc ; Jacq, Caroline ; Corradini, Giancarlo ; Ryser, Peter
Volume
2
fYear
2005
fDate
25-28 July 2005
Firstpage
139
Lastpage
142
Keywords
Capacitive sensors; Ceramics; Conductivity; Force measurement; Force sensors; Mechanical sensors; Piezoresistance; Resistors; Substrates; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Research in Microelectronics and Electronics, 2005 PhD
Print_ISBN
0-7803-9345-7
Type
conf
DOI
10.1109/RME.2005.1542956
Filename
1542956
Link To Document