Millinewton force sensor based on low temperature co-fired ceramic (LTCC) technology
Author :
Birol, Hansu ; Maeder, Thomas ; Boers, Marc ; Jacq, Caroline ; Corradini, Giancarlo ; Ryser, Peter
Volume :
2
fYear :
2005
fDate :
25-28 July 2005
Firstpage :
139
Lastpage :
142
Keywords :
Capacitive sensors; Ceramics; Conductivity; Force measurement; Force sensors; Mechanical sensors; Piezoresistance; Resistors; Substrates; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Research in Microelectronics and Electronics, 2005 PhD
