DocumentCode
2557229
Title
Vibration equation of coupled RLC series circuit and micro-beam system
Author
Zhi-An Yang ; Shang-shuai Jia ; Yi-hui Cui
Author_Institution
Key Lab. of Struct. & Vibration Eng. of Tangshan, Tangshan
fYear
2008
fDate
2-4 July 2008
Firstpage
1315
Lastpage
1317
Abstract
In order to study the dynamics of micro-electro-mechanical system, existing problems in micro-beam are discussed in this paper. A new physical model of coupled RLC series circuit and micro-beam system is presented. According to the Largrange-Maxemellpsilas equation, the vibration equation of coupled system is established, which is reflects the micro-electro-mechanical character of the system accurately.
Keywords
RLC circuits; beams (structures); distributed parameter systems; micromechanical devices; micromechanics; vibration control; Largrange-Maxemell equation; coupled RLC series circuit; microbeam; microelectromechanical system; vibration equation; Coupling circuits; Equations; RLC circuits; Largrange-Maxemell’s equation; RLC circuit; coupling; micro-beam; vibration equation;
fLanguage
English
Publisher
ieee
Conference_Titel
Control and Decision Conference, 2008. CCDC 2008. Chinese
Conference_Location
Yantai, Shandong
Print_ISBN
978-1-4244-1733-9
Electronic_ISBN
978-1-4244-1734-6
Type
conf
DOI
10.1109/CCDC.2008.4597529
Filename
4597529
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