Title :
Vibration equation of coupled RLC series circuit and micro-beam system
Author :
Zhi-An Yang ; Shang-shuai Jia ; Yi-hui Cui
Author_Institution :
Key Lab. of Struct. & Vibration Eng. of Tangshan, Tangshan
Abstract :
In order to study the dynamics of micro-electro-mechanical system, existing problems in micro-beam are discussed in this paper. A new physical model of coupled RLC series circuit and micro-beam system is presented. According to the Largrange-Maxemellpsilas equation, the vibration equation of coupled system is established, which is reflects the micro-electro-mechanical character of the system accurately.
Keywords :
RLC circuits; beams (structures); distributed parameter systems; micromechanical devices; micromechanics; vibration control; Largrange-Maxemell equation; coupled RLC series circuit; microbeam; microelectromechanical system; vibration equation; Coupling circuits; Equations; RLC circuits; Largrange-Maxemell’s equation; RLC circuit; coupling; micro-beam; vibration equation;
Conference_Titel :
Control and Decision Conference, 2008. CCDC 2008. Chinese
Conference_Location :
Yantai, Shandong
Print_ISBN :
978-1-4244-1733-9
Electronic_ISBN :
978-1-4244-1734-6
DOI :
10.1109/CCDC.2008.4597529
