DocumentCode
2557941
Title
Cutoff probe diagnostic for precise measurement of electron density
Author
You, S.J. ; Kim, D.W. ; You, K.H. ; Kim, J.H. ; Shin, Y.H. ; Na, B.K. ; Chang, H.Y.
Author_Institution
Korea Institute of Standards and Science (KRISS), South Korea
fYear
2012
fDate
8-13 July 2012
Abstract
Summary form only given. In this contribution we present the physics behind the cut off probe and discuss recent advancements for the practical implementation of this diagnostic technique in industrial settings.
Keywords
Density measurement; Physics; Plasma density; Plasma measurements; Pressure measurement; Probes; Standards;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location
Edinburgh
ISSN
0730-9244
Print_ISBN
978-1-4577-2127-4
Electronic_ISBN
0730-9244
Type
conf
DOI
10.1109/PLASMA.2012.6383533
Filename
6383533
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