Title :
Cutoff probe diagnostic for precise measurement of electron density
Author :
You, S.J. ; Kim, D.W. ; You, K.H. ; Kim, J.H. ; Shin, Y.H. ; Na, B.K. ; Chang, H.Y.
Author_Institution :
Korea Institute of Standards and Science (KRISS), South Korea
Abstract :
Summary form only given. In this contribution we present the physics behind the cut off probe and discuss recent advancements for the practical implementation of this diagnostic technique in industrial settings.
Keywords :
Density measurement; Physics; Plasma density; Plasma measurements; Pressure measurement; Probes; Standards;
Conference_Titel :
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location :
Edinburgh
Print_ISBN :
978-1-4577-2127-4
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2012.6383533
