Low-Loss Coplanar Waveguide Transmission Lines and Vertical Interconnects on Multi-Layer Parylene-N

Author

Lahiji, R.R. ; Sharifi, H. ; Mohammadi, S. ; Katehi, L.P.B.

Author_Institution

Sch. of Electr. & Comput. Eng., Purdue Univ., West Lafayette, IN

fYear

2009

fDate

19-21 Jan. 2009

Firstpage

1

Lastpage

4

Abstract

Coplanar waveguide transmission lines and vertical interconnects are implemented on a thick (15 mum) Parylene-N dielectric layer over a lossy CMOS-grade Si substrate. Devices are measured up to 40 GHz and show very low loss behavior. Low loss tangent and low dielectric constant characteristics of Parylene-N result in significant improvement of transmission lines and interconnects compared to those implemented in a standard Si integrated circuit technology.

Keywords

coplanar transmission lines; coplanar waveguides; dielectric losses; integrated circuit interconnections; organic compounds; permittivity; CMOS; Si; coplanar waveguide; dielectric constant; dielectric layer; low loss tangent characteristics; multilayer parylene-N; transmission lines; vertical interconnects; Coplanar transmission lines; Coplanar waveguides; Dielectric loss measurement; Dielectric losses; Dielectric measurements; Dielectric substrates; Integrated circuit interconnections; Loss measurement; Propagation losses; Transmission line measurements;

fLanguage

English

Publisher

ieee

Conference_Titel

Silicon Monolithic Integrated Circuits in RF Systems, 2009. SiRF '09. IEEE Topical Meeting on

Conference_Location

San Diego, CA

Print_ISBN

978-1-4244-3940-9

Electronic_ISBN

978-1-4244-2831-1

Type

conf

DOI

10.1109/SMIC.2009.4770533

Filename

4770533