DocumentCode
2558154
Title
2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)
fYear
2004
fDate
9-10 Sept. 2004
Abstract
The following topics are dealt with: manufacturing logistics; CIM; production management; yield enhancement; advanced industrial processes; and process control.
Keywords
computer integrated manufacturing; control engineering computing; logistics; process control; production engineering computing; semiconductor device manufacture; CIM; advanced industrial processes; computer integrated manufacturing; manufacturing logistics; process control; production management; yield enhancement;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing Technology Workshop Proceedings, 2004
Conference_Location
Hsinchu
Print_ISBN
0-7803-8469-5
Type
conf
DOI
10.1109/SMTW.2004.1393686
Filename
1393686
Link To Document