Title :
Diagnostics and modelling for the optimization of precursor evaporation in silicon nano-particle synthesis by radiofrequency induction thermal plasmas
Author :
Colombo, Vittorio ; Ghedini, Emanuele ; Gherardi, Matteo ; Sanibondi, Paolo ; Delval, C. ; Leparoux, M.
Author_Institution :
Dept. of Mech. Eng. (D.I.E.M.), Univ. di Bologna, Bologna, Italy
Abstract :
The evaporation of micro-sized silicon solid precursor in a laboratory scale radio-frequency induction thermal plasma system for nano-particles synthesis has been investigated with the aim of increasing the production yield of the process, which is one of the more critical issues in making this technology successful on an industrial scale [1].
Keywords :
elemental semiconductors; evaporation; nanofabrication; nanoparticles; plasma materials processing; silicon; Si; diagnosis; evaporation; microsized silicon solid precursor; radio-frequency induction thermal plasmas; silicon nanoparticle; Frequency synthesizers; Laboratories; Optimization; Plasmas; Probes; Radio frequency; Silicon;
Conference_Titel :
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location :
Edinburgh
Print_ISBN :
978-1-4577-2127-4
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2012.6383561
