Title :
Dynamic microfluidic photomasking
Author :
McKechnie, Jonathan ; Sinton, David
Author_Institution :
Victoria Univ.
Abstract :
This paper presents a novel microfluidic photomasking strategy. Multi-layer laminar microfluidic streaming is exploited to achieve photomasking with dynamic spatial control. Applications to microarray and photoresist patterning are investigated
Keywords :
masks; micro-optics; microfluidics; optical fabrication; photoresists; microarray; microfluidic; multilayer laminar; photomasking; photoresist patterning; Fabrication; Fluid dynamics; Geometry; Lithography; Microelectromechanical systems; Microelectronics; Microfluidics; Resists; Scanning electron microscopy; Streaming media; Microfluidic Photomask; Microfluidics; Optofluidics;
Conference_Titel :
LEOS Summer Topical Meetings, 2006 Digest of the
Conference_Location :
Quebec City, Que.
Print_ISBN :
1-4244-0090-2
DOI :
10.1109/LEOSST.2006.1693971
