A novel planar magnetic sensor based on orthogonal fluxgate principle

Author

Zorlu, O. ; Kejik, P. ; Vincent, F. ; Popovic, R.S.

Author_Institution

Lab. de Microsyst., Ecole Polytechnique Federale de Lausanne, Switzerland

Volume

1

fYear

2005

fDate

25-28 July 2005

Firstpage

241

Abstract

In this paper, we present a new planar fluxgate magnetometer structure. The sensor has the orthogonal fluxgate configuration which makes the detection part independent of the excitation mechanism. The sensor consists of a ferromagnetic cylindrical core covering an excitation rod, and planar coils for signal detection. The fabricated sensor has a linear range of ± a sensitivity of 4.3 mV/mT, and a perming below 400 nT for 200 mA peak sinusoidal excitation current at 100 kHz. The effect of demagnetization on the sensitivity, linear range, and perming for this structure is demonstrated by varying the length of the ferromagnetic core.

Keywords

demagnetisation; ferromagnetic materials; fluxgate magnetometers; magnetic cores; magnetic sensors; 100 kHz; 200 mA; demagnetization; excitation mechanism; excitation rod; ferromagnetic cylindrical cores; orthogonal fluxgate principle; planar fluxgate magnetometer structure; planar magnetic sensor; Coils; Demagnetization; Gold; Magnetic cores; Magnetic field measurement; Magnetic materials; Magnetic sensors; Permeability; Saturation magnetization; Wire;

fLanguage

English

Publisher

ieee

Conference_Titel

Research in Microelectronics and Electronics, 2005 PhD

Print_ISBN

0-7803-9345-7

Type

conf

DOI

10.1109/RME.2005.1543048

Filename

1543048