Title :
Automatic generation of a 3-D solid model of a microfabricated structure
Author :
Harris, R.M. ; Maseeh, F. ; Senturia, S.D.
Author_Institution :
Microsyst. Technol. Lab., MIT, Cambridge, MA, USA
Abstract :
The automatic construction of a 3-D solid model from a specification of mask layout and process sequence is demonstrated. The process sequence consists of planar deposition and masked etch. The generated 3-D solid model is directly usable by mechanical CAD software and is used to do a deformation analysis of the structure. An overview of the CAD system is given, and the structure simulator is described in detail.<>
Keywords :
CAD; etching; masks; mechanical engineering computing; micromechanical devices; semiconductor technology; 3D solid model; deformation analysis; mask layout; masked etch; mechanical CAD software; microfabricated structure; planar deposition; process sequence; structure simulator; Actuators; Computer aided manufacturing; Design automation; Material properties; Mechanical sensors; Microelectronics; Packaging; Predictive models; Semiconductor device modeling; Solid modeling;
Conference_Titel :
Solid-State Sensor and Actuator Workshop, 1990. 4th Technical Digest., IEEE
Conference_Location :
Hilton Head Island, SC, USA
DOI :
10.1109/SOLSEN.1990.109815
