Title :
Considerations for cleanroom control in different climatic regions
Author :
Tsai, Chun-Hung ; Chung, Kung-Yao ; Wang, Chun-Mine
Author_Institution :
United Microelectron. Corp., Hsinchu, Taiwan
Abstract :
The cleanroom control systems should be designed according to different climatic regions. This work investigates how the climatic difference affects the design of the make-up-air unit, MAU, which controls temperature and humidity in a cleanroom. We recommend suitable designs for different climatic regions around the world. We also establish a database for MAU design of different climatic regions.
Keywords :
clean rooms; control engineering computing; control system synthesis; database management systems; design engineering; humidity control; semiconductor device manufacture; temperature control; cleanroom control systems; climatic regions; humidity control; make-up-air unit; temperature control; Cities and towns; Coils; Databases; Humans; Humidity control; Moisture; Spraying; Temperature control; Water heating; Water pollution;
Conference_Titel :
Semiconductor Manufacturing Technology Workshop Proceedings, 2004
Print_ISBN :
0-7803-8469-5
DOI :
10.1109/SMTW.2004.1393718
