Aluminium porous oxide for electrets

Summary form only given, as follows. Progress in functional electronics requires development of new electret materials exhibiting high electret characteristics and compatibility with electronic technology. A coupled anodic oxide-polymer is a prospective electret material. The proper choice of electrolyte composition and anodization regime yields porous oxide films with a geometry of regular pores. It has been shown that pore growth is a result of concurrent etching and oxidation. Pore parameters and their change owing to regime switching have been simulated, and the effect of incorporated space charge on leakage current has been estimated.<>