DocumentCode
2559948
Title
Development of a new multilayer copper-dielectric system
Author
Hang, K.W. ; Onyshkevych, L.S. ; Prabhu, A.N. ; Thaler, B.J.
Author_Institution
David Sarnoff Res. Center, Princeton, NJ, USA
fYear
1988
fDate
9-11 May 1988
Firstpage
629
Lastpage
635
Abstract
The development of a copper conductor and multilayer dielectric ink system, designed to overcome the dielectric porosity, Cu diffusion, and reheat stability problems commonly experienced with thick films fired in nitrogen, is discussed. The characteristics of the Cu and dielectric inks, which are formulated for screen printing on alumina substrates and firing in nitrogen at peak temperatures of 900-925 degrees C, are discussed. The dielectric, which is based on a devitrifying glass with ceramic oxides, produces extremely dense films having thermal expansion characteristics matching the substrate with a reheat stability up to 900 degrees C. Copper thick films on the dielectric are free from blistering in multilayers, and the dielectric is quite resistant to the diffusion of liquid flux phases present during the firing step. The dielectric typically passes the conductive salt solution porosity test with less than 1 mu A/cm/sup 2/ leakage current. The influence of the organic binder-system on dielectric film density and results of dielectric porosity and accelerated aging tests on multilayer circuit boards are discussed.<>
Keywords
ageing; copper; integrated circuit testing; porosity; thick film circuits; 900 to 925 C; Al/sub 2/O/sub 3/ substrate; Cu-Al/sub 2/O/sub 3/; N; accelerated aging tests; ceramic oxides; conductive salt solution porosity test; dielectric film density; dielectric porosity; diffusion; firing; leakage current; multilayer circuit boards; multilayer dielectric ink system; organic binder-system; reheat stability; screen printing; thermal expansion characteristics; Circuit testing; Copper; Dielectric films; Dielectric liquids; Dielectric substrates; Firing; Ink; Nitrogen; Nonhomogeneous media; Thick films;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Components Conference, 1988., Proceedings of the 38th
Conference_Location
Los Angeles, CA, USA
Type
conf
DOI
10.1109/ECC.1988.12659
Filename
12659
Link To Document