A Silicon Micromechanical Resonator Based CMOS Bandpass Sigma-Delta Modulator

Author

Xu, Yong Ping ; Yu, Rui ; Hsu, Wan-Thai ; Brown, Andrew R.

Author_Institution

Dept of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore

fYear

2006

fDate

13-15 Nov. 2006

Firstpage

143

Lastpage

146

Abstract

This paper describes a bandpass SigmaDelta modulator employing a silicon micromechanical resonator as the loop filter. The micromechanical resonator is chosen primarily for its high quality factor and low power consumption. A 2^nd-order prototype bandpass SigmaDelta modulator is realized in a 0.35-mum CMOS process and tested with a 19.6-MHz silicon micromechanical resonator. The measured results show a peak SNDR of 51 dB and a dynamic range of 52.5 dB in a 200-kHz signal bandwidth.

Keywords

CMOS digital integrated circuits; band-pass filters; micromechanical resonators; resonator filters; sigma-delta modulation; silicon; CMOS bandpass sigma-delta modulator; Si; bandpass SigmaDelta modulator; frequency 19.6 MHz; frequency 200 kHz; loop filter; modulator structure; silicon micromechanical resonator; size 0.35 mum; Band pass filters; CMOS process; Delta-sigma modulation; Energy consumption; Micromechanical devices; Prototypes; Q factor; Resonator filters; Silicon; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference, 2006. ASSCC 2006. IEEE Asian

Conference_Location

Hangzhou

Print_ISBN

0-7803-9734-7

Electronic_ISBN

0-7803-97375-5

Type

conf

DOI

10.1109/ASSCC.2006.357872

Filename

4197611