DocumentCode
2560168
Title
Management considerations in choosing a chemical supply system
Author
Tsai, Chun-Hung ; Lin, Yu-Chung ; Hsu, Chuen-Tun ; Cheng, Rang-Tian ; Chang, Chung-Chieh ; Lin, Yung-Chao ; Chao, Po-Jen
Author_Institution
United Microelectron. Corp., Hsinchu
fYear
2004
fDate
10-10 Sept. 2004
Firstpage
190
Lastpage
193
Abstract
This paper discusses considerations in choosing a chemical supply system for semiconductor fabs. We investigate the characteristics of three major supply systems, drum, lorry and dilution system. The initial costs and footprints are totally different among them. Based on the cost analysis, this paper provides a simple criterion of using the lorry supply system. Besides discussion, information of leading fabs in each field is benchmarked in this paper
Keywords
cost-benefit analysis; manufacturing systems; semiconductor device manufacture; supply chain management; chemical supply system; dilution system; drum supply system; lorry supply system; semiconductor fabrication; Chaos; Chemical industry; Chemical processes; Costs; Foundries; Manufacturing processes; Microelectronics; Random access memory; Risk management; Waste management;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing Technology Workshop Proceedings, 2004
Conference_Location
Hsinchu
Print_ISBN
0-7803-8469-5
Type
conf
DOI
10.1109/SMTW.2004.1393762
Filename
1393762
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