Title :
Touch trigger probe with PVDF sensor
Author :
Haeusler, E. ; Rech, V.
Author_Institution :
Dept. of Electr. Eng., Saarland Univ., Saarbrucken, West Germany
Abstract :
A touch-trigger probe with a PVDF (polyvinylidine fluoride) sensor for use in a 3-D-coordinate measurement machine was developed. The sensor consists of a circular PVDF film sheet (diameter 2 cm, thickness 20 μm) divided into three electrically insulated segments. The mechanically prestressed PVDF film sensor generates an electric signal if the probe touches an obstacle, independent of the touching direction (axial or transverse). The precision of the probe is of the order of a micron or less. The construction principle is described, and limits of spatial resolution are discussed
Keywords :
electric sensing devices; piezoelectric transducers; polymer films; probes; spatial variables measurement; tactile sensors; PVDF film sensor; piezofilm; polyvinylidine fluoride; spatial resolution; three dimensional coordinate measurement machine; touch-trigger probe; Force measurement; Force sensors; Insulation; Magnetic heads; Probes; Signal generators; Signal resolution; Stress; Tactile sensors; Thick film sensors;
Conference_Titel :
Electrets, 1988. (ISE 6) Proceedings., 6th International Symposium on (IEEE Cat. No.88CH2593-2)
Conference_Location :
Oxford
DOI :
10.1109/ISE.1988.38649