Automation of Measurements of Parameters of the Heat Flux Sensor

The subject of research is polysilicon thermal sensor of thermoelectric type based on profiled membrane. Accuracy and simplicity of measurement of parameters of such sensors plays very important role. The developed microprocessor measuring system allows determine output characteristics of heat flux sensor (HFS) with high accuracy and get reliable results. The modified measuring system allows estimate sensitivity of the sensor structure with higher accuracy. In work the variant of case registration of a thermal sensor control is offered. The thermal e.m.f. factor was experimentally determined with the help of test structure. It was shown that experimental value of the sensitivity of HFS is confirmed by early expected theoretically value of HFS sensitivity