Title :
Increasing the time-constant of a thin film multijunction thermal converter for low frequency application (AC/DC transfer)
Author :
Klonz, M. ; Weimann, T.
Author_Institution :
Physikalisch-Tech. Bundesanstalt, Braunschweig, Germany
Abstract :
A planar thin-film multijunction thermal converter (MJTC) developed for low-frequency application has been optimized by adding a thermal mass in the heater area to increase the time constant of the MJTC from 100 ms to 3 s and more. The thermal mass of silicon is left under the heater during the anisotropic etching process. This technique should substantially reduce the transfer difference at frequencies below 100 Hz.<>
Keywords :
convertors; electric current measurement; elemental semiconductors; etching; heat sinks; silicon; thin film devices; 100 Hz; 100 ms to 3 s; PTB; Si-SiO/sub 2/; anisotropic etching process; thermal mass; thin film multijunction thermal converter; time constant; time-constant; Capacitance; Etching; Frequency conversion; Heat sinks; Heat transfer; Silicon; Temperature; Thermal conductivity; Transistors; Voltage;
Conference_Titel :
Precision Electromagnetic Measurements, 1990. CPEM '90 Digest., Conference on
Conference_Location :
Ottawa, Ontario, Canada
DOI :
10.1109/CPEM.1990.109958
