Title :
The Method of Semiconductor Structure Impedance Measurement
Author_Institution :
Tomsk State Univ. of Control of Syst. of Radioelectronic
Abstract :
A semiconductor structure impedance measurement circuit calculation using the differencing circuit is presented. Also the developed method of measurement of phase difference by three-amplitude method is presented. These presented methods excel by their simplicity and performance
Keywords :
MIS structures; differential amplifiers; electric impedance measurement; operational amplifiers; MIS structure; circuit calculation; differencing circuit; differentiating operational amplifier; phase difference measurement; semiconductor structure impedance measurement; three-amplitude method; Admittance measurement; Circuit testing; Frequency; Impedance measurement; Phase measurement; Semiconductor device measurement; Semiconductor device testing; Semiconductor devices; Shape; Voltage; differentiating operational amplifier; semiconductor structure impedance measurement; three-phase method;
Conference_Titel :
Electron Devices and Materials, 2006. Proceedings. 7th Annual 2006 International Workshop and Tutorials on
Conference_Location :
Erlagol, Altai
Print_ISBN :
5-7782-0646-1
DOI :
10.1109/SIBEDM.2006.231661
