A Bandpass ΔΣ Interface IC for Sacrificial Bulk Micromachined Inertial Sensors

Author

Lee, Sang-Yoon ; Kim, Jaeha ; Lee, Bong-Joon ; Kim, Hwi-Cheol ; Ko, Hyung-Ho ; Cho, Dong-il Dan ; Jeong, Deog-Kyoon

Author_Institution

Seoul Nat. Univ., Seoul

fYear

2006

fDate

13-15 Nov. 2006

Firstpage

439

Lastpage

442

Abstract

A bandpass ΔΣ interface IC for sacrificial bulk micromachined inertial sensors is presented. To achieve high resolution without precision analog circuits, the proposed architecture replaces the analog mixer of a chopper-stabilized readout amplifier with a 1-bit, 4th-order bandpass ΔΣ modulator and a digital decimator/demodulator. Leveraging the high over-sampling ratio of 8192 and the supporting circuit techniques, the interface IC provides a 128-Hz, 20-bit digital output with 113 dB peak SNR and 115 dB dynamic range (DR). Fabricated in 0.18 μm CMOS, the IC dissipates 56.1 mW.

Keywords

amplifiers; delta-sigma modulation; demodulators; inertial systems; microsensors; readout electronics; bandpass ΔΣ interface IC; bandpass ΔΣ modulator; chopper-stabilized readout amplifier; digital decimator; digital demodulator; sacrificial bulk micromachined inertial sensors; Accelerometers; Analog integrated circuits; Angular velocity; Capacitance; Capacitive sensors; Demodulation; Digital integrated circuits; Digital modulation; Integrated circuit noise; Micromechanical devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference, 2006. ASSCC 2006. IEEE Asian

Conference_Location

Hangzhou

Print_ISBN

0-7803-9734-7

Electronic_ISBN

0-7803-97375-5

Type

conf

DOI

10.1109/ASSCC.2006.357945

Filename

4197684