Title :
Real time in situ electron spin resonance (ESR) study of surface reactoin on polymer interacted with plasma
Author :
Hori, Muneo ; Ishikawa, Kenji ; Sumi, Nanoka ; Takeda, Kenji ; Tajima, Shinya ; Kondo, Hiroki ; Sekine, Masakazu ; Kono, A. ; Horibe, H.
Author_Institution :
Nagoya Univ., Nagoya, Japan
Abstract :
Summary form only given. A comprehensive understanding of interaction between plasmas and soft-materials is essential for advanced plasma processing technology. Simultaneous measurements of signals arisen form both the gas-phase species and the surface dangling bonds, and kinetics analysis of radical formation was performed using in situ real-time electron spin resonance (ESR). Chemical reactions under plasma are very complicated, due to the simultaneous irradiation of electrons, ions, radicals, and photons. Therefore, the individual contributions of each of these reactive species in the plasma must be elucidated.
Keywords :
paramagnetic resonance; plasma chemistry; plasma diagnostics; plasma kinetic theory; plasma-wall interactions; advanced plasma processing technology; chemical reactions; distance 20 cm; electron irradiation; electron spin resonance; gas phase species; ion irradiation; kinetics analysis; photon irradiation; polymer interactions; radical formation; radical irradiation; reactive species; signal measurements; size 9 mm; soft-materials; surface dangling bonds; surface reaction; Electron tubes; Plasma measurements; Plasmas; Polymers; Real-time systems; Surface discharges; Surface treatment;
Conference_Titel :
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location :
Edinburgh
Print_ISBN :
978-1-4577-2127-4
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2012.6383738
