DocumentCode
2562263
Title
A flexible technology platform for the fabrication of RF-MEMS devices
Author
Giacomozzi, F. ; Mulloni, V. ; Colpo, S. ; Iannacci, J. ; Margesin, B. ; Faes, A.
Author_Institution
FBK, Trento, Italy
Volume
1
fYear
2011
fDate
17-19 Oct. 2011
Firstpage
155
Lastpage
158
Abstract
The paper reports about the technology platform for the fabrication of RF-MEMS devices developed at FBK. The most important process features, requirements and possible applications are presented and described. The basic fabrication process, together with some of the more important process variations and its capabilities are reported. Finally, some examples of produced devices and their performances are briefly presented.
Keywords
microfabrication; micromechanical devices; FBK; RF-MEMS device; flexible technology platform; Electrodes; Fabrication; Gold; Lithography; Radio frequency; Resists; Substrates; RF-MEMS; fabrication process;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference (CAS), 2011 International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-61284-173-1
Type
conf
DOI
10.1109/SMICND.2011.6095744
Filename
6095744
Link To Document