Title :
A flexible technology platform for the fabrication of RF-MEMS devices
Author :
Giacomozzi, F. ; Mulloni, V. ; Colpo, S. ; Iannacci, J. ; Margesin, B. ; Faes, A.
Author_Institution :
FBK, Trento, Italy
Abstract :
The paper reports about the technology platform for the fabrication of RF-MEMS devices developed at FBK. The most important process features, requirements and possible applications are presented and described. The basic fabrication process, together with some of the more important process variations and its capabilities are reported. Finally, some examples of produced devices and their performances are briefly presented.
Keywords :
microfabrication; micromechanical devices; FBK; RF-MEMS device; flexible technology platform; Electrodes; Fabrication; Gold; Lithography; Radio frequency; Resists; Substrates; RF-MEMS; fabrication process;
Conference_Titel :
Semiconductor Conference (CAS), 2011 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-61284-173-1
DOI :
10.1109/SMICND.2011.6095744
