Multi-functional annealing using flexibly-shaped-pulse flash lamp annealing (FSP-FLA) for high-k/metal gated CMOS devices

Author

Aoyama, Takayuki ; Kato, Shin-ichi ; Onizawa, Takashi ; Ikeda, Kazuto ; Ohji, Yuzuru

Author_Institution

Semicond. Leading Edge Technol., Inc. (Selete), Tsukuba, Japan

fYear

2009

fDate

11-12 June 2009

Firstpage

110

Lastpage

115

Abstract

We have presented functional annealing data using the FSP-FLA (flexibly-shaped-pulse flash lamp annealing), together with some examples of the multi-functionality. First, we showed that the FSP-FLA can control thermal budget whilst sustaining high dopant activation, recovering crystalline defects, and controlling thermal diffusion length. Secondly, by combining impulses from conventional FLA and the trapezoidal pulse of the FSP-FLA, we can improve BTI (bias-temperature instability) lifetime and carrier mobility (mu_eff), without degrading Rs-Xj (sheet resistance and junction depth) characteristics. In addition, we showed the FSP-FLA pulse for preheat control. Therefore, we have a high confidence that FLA has evolved to the 2^nd generation with the FSP-FLA system and it will be a main-stream annealing method for scaled high-k/metal gated devices in the near future.

Keywords

CMOS integrated circuits; carrier mobility; high-k dielectric thin films; incoherent light annealing; semiconductor junctions; thermal diffusion; bias-temperature instability; carrier mobility; complimentary metal-oxide-semiconductor devices; flexibly-shaped-pulse flash lamp annealing; functional annealing data; high-k/metal gated CMOS devices; multifunctional annealing; ultra-shallow junction; Annealing; CMOS technology; Circuits; Electrical resistance measurement; High K dielectric materials; High-K gate dielectrics; Lamps; Pulse shaping methods; Switches; Tin;

fLanguage

English

Publisher

ieee

Conference_Titel

Junction Technology, 2009. IWJT 2009. International Workshop on

Conference_Location

Kyoto

Print_ISBN

978-1-4244-3319-3

Electronic_ISBN

978-1-4244-3320-9

Type

conf

DOI

10.1109/IWJT.2009.5166232

Filename

5166232