DocumentCode
2562688
Title
Growth of nanometer sized particles in a dc discharge
Author
Worner, L. ; Berndt, J. ; Kovacevic, E. ; Thomas, Hubertus M. ; Thoma, M.H. ; Boufendi, L. ; Morfill, Gregor E.
Author_Institution
MPE, Garching, Germany
fYear
2012
fDate
8-13 July 2012
Abstract
Particle growth has been a subject to many different investigations. Besides industrial interests also the fundamental processes are being studied. It has been found, that particle growth can be divided into three stages: nucleation, coagulation and accretion [1].
Keywords
coagulation; high-frequency discharges; nanofabrication; nanoparticles; nucleation; plasma materials processing; DC discharge; accretion; coagulation; nanometer sized particle growth; nucleation; Coagulation; Discharges (electric); Electrodes; Fluid flow; Materials; Plasmas; Radio frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location
Edinburgh
ISSN
0730-9244
Print_ISBN
978-1-4577-2127-4
Electronic_ISBN
0730-9244
Type
conf
DOI
10.1109/PLASMA.2012.6383789
Filename
6383789
Link To Document