Title :
Growth of nanometer sized particles in a dc discharge
Author :
Worner, L. ; Berndt, J. ; Kovacevic, E. ; Thomas, Hubertus M. ; Thoma, M.H. ; Boufendi, L. ; Morfill, Gregor E.
Author_Institution :
MPE, Garching, Germany
Abstract :
Particle growth has been a subject to many different investigations. Besides industrial interests also the fundamental processes are being studied. It has been found, that particle growth can be divided into three stages: nucleation, coagulation and accretion [1].
Keywords :
coagulation; high-frequency discharges; nanofabrication; nanoparticles; nucleation; plasma materials processing; DC discharge; accretion; coagulation; nanometer sized particle growth; nucleation; Coagulation; Discharges (electric); Electrodes; Fluid flow; Materials; Plasmas; Radio frequency;
Conference_Titel :
Plasma Science (ICOPS), 2012 Abstracts IEEE International Conference on
Conference_Location :
Edinburgh
Print_ISBN :
978-1-4577-2127-4
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2012.6383789
