Title :
Microsensors and systems for industrial use (requirements and specifications)
Author :
Hofmann, Daniela ; Freitag, Hans-Joachiim
Author_Institution :
CiS Inst. for Microsensorics, Erfurt, Germany
Abstract :
The aim of this paper is to support the development and application of new microsensors and systems in the strategic line of mass products: small in dimensions, mass, energy consumption, maintenance and costs; intelligent through compatibility with low power microcomputers for virtual instrumentation; standardising by itself because small and intelligent microsensors and systems will be the new standards in automation of industrial, domestic, transportation, biomedical, information and communication processes. Practical examples will be explained for hybrid integrated silicon based micro sensors and systems for position measurements
Keywords :
microsensors; position measurement; standards; virtual instrumentation; hybrid integrated systems; industrial use; low power microcomputers; mass products; microsensors; position measurements; standards; virtual instrumentation; Automation; Communication standards; Costs; Energy consumption; Instruments; Intelligent sensors; Intelligent transportation systems; Microcomputers; Microsensors; Standards development;
Conference_Titel :
Micromechatronics and Human Science, 1998. MHS '98. Proceedings of the 1998 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-5130-4
DOI :
10.1109/MHS.1998.745743
