Title :
Application of MEMS technology in automotive sensors and actuators
Author_Institution :
Delco Electron. Corp., Kokomo, IN
Abstract :
High volume sensors and actuators are employed in the automotive industry in millions per year and at a unit cost of a few dollars. The design and manufacturing of automotive sensors and actuators has increasingly relied on microelectromechanical systems (MEMS) technology. This presentation reviews micromachined automotive sensors and actuators, and the related MEMS technology
Keywords :
automotive electronics; microactuators; microsensors; reviews; MEMS technology; automotive actuators; automotive sensors; microelectromechanical systems; micromachined devices; Actuators; Automotive engineering; Communication system control; Control systems; Costs; Engines; Manufacturing; Micromechanical devices; Packaging; Sensor systems;
Conference_Titel :
Micromechatronics and Human Science, 1998. MHS '98. Proceedings of the 1998 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-5130-4
DOI :
10.1109/MHS.1998.745744
