• DocumentCode
    2562998
  • Title

    Application of MEMS technology in automotive sensors and actuators

  • Author

    Sparks, D.R.

  • Author_Institution
    Delco Electron. Corp., Kokomo, IN
  • fYear
    1998
  • fDate
    25-28 Nov 1998
  • Firstpage
    9
  • Lastpage
    15
  • Abstract
    High volume sensors and actuators are employed in the automotive industry in millions per year and at a unit cost of a few dollars. The design and manufacturing of automotive sensors and actuators has increasingly relied on microelectromechanical systems (MEMS) technology. This presentation reviews micromachined automotive sensors and actuators, and the related MEMS technology
  • Keywords
    automotive electronics; microactuators; microsensors; reviews; MEMS technology; automotive actuators; automotive sensors; microelectromechanical systems; micromachined devices; Actuators; Automotive engineering; Communication system control; Control systems; Costs; Engines; Manufacturing; Micromechanical devices; Packaging; Sensor systems;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micromechatronics and Human Science, 1998. MHS '98. Proceedings of the 1998 International Symposium on
  • Conference_Location
    Nagoya
  • Print_ISBN
    0-7803-5130-4
  • Type

    conf

  • DOI
    10.1109/MHS.1998.745744
  • Filename
    745744