DocumentCode
2562998
Title
Application of MEMS technology in automotive sensors and actuators
Author
Sparks, D.R.
Author_Institution
Delco Electron. Corp., Kokomo, IN
fYear
1998
fDate
25-28 Nov 1998
Firstpage
9
Lastpage
15
Abstract
High volume sensors and actuators are employed in the automotive industry in millions per year and at a unit cost of a few dollars. The design and manufacturing of automotive sensors and actuators has increasingly relied on microelectromechanical systems (MEMS) technology. This presentation reviews micromachined automotive sensors and actuators, and the related MEMS technology
Keywords
automotive electronics; microactuators; microsensors; reviews; MEMS technology; automotive actuators; automotive sensors; microelectromechanical systems; micromachined devices; Actuators; Automotive engineering; Communication system control; Control systems; Costs; Engines; Manufacturing; Micromechanical devices; Packaging; Sensor systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Micromechatronics and Human Science, 1998. MHS '98. Proceedings of the 1998 International Symposium on
Conference_Location
Nagoya
Print_ISBN
0-7803-5130-4
Type
conf
DOI
10.1109/MHS.1998.745744
Filename
745744
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