Nanostructured indium phosphide used in electrowetting system for biosensor applications

Author

Sirbu, L. ; Voda, I. ; Esinenco, D. ; Muller, R. ; Voicu, R. ; Danila, M. ; Ghimpu, L. ; Tiginyanu, I.M. ; Ursaki, V.

Author_Institution

Inst. of Electron. Eng. & Nanotechnol. "D. Ghitu", Chisinau, Moldova

Volume

2

fYear

2011

fDate

17-19 Oct. 2011

Firstpage

237

Lastpage

240

Abstract

We demonstrated the fabrication of complex nanostructured InP membranes with porous compact packed structure that have been cut during electrochemical etching in the same anodic process. The membranes were filled with optically transparent compounds. We considered the covering of the nanoporous film and filling the pores with polymers imprinted with nano metallic particles in order to stabilize and adjust the sensor characteristics for specific biological samples. Also we designed and fabricated lab-on-a-chip devices based on Si which can be used for transporting bio-samples to the detector by means of electrowetting method. The experimental study and emulations based on Finite Element Model (FEM) show also that the obtained materials are promising for nonlinear optical applications, in particular for the development of electrowetting systems for MEMS, MOEMS, etc.

Keywords

bioMEMS; biosensors; electrochemistry; etching; finite element analysis; indium compounds; lab-on-a-chip; membranes; nanoporous materials; polymers; thin films; wetting; FEM; InP; MEMS; MOEMS; biosample transport; biosensor applications; complex nanostructured InP membranes; electrochemical etching; electrowetting method; electrowetting systems; finite element model; indium phosphide; lab on a chip devices; nanometallic particle imprinted polymers; nanoporous film; nonlinear optical applications; optically transparent compounds; porous compact packed structure; sensor characteristics; Compounds; Dielectrics; Electrodes; Films; Indium phosphide; Nanobioscience; Nanoparticles;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference (CAS), 2011 International

Conference_Location

Sinaia

ISSN

1545-827X

Print_ISBN

978-1-61284-173-1

Type

conf

DOI

10.1109/SMICND.2011.6095780

Filename

6095780