Title :
Microsensors and microactuators using ferroelectric thin films
Author :
Okuyama, Masanori
Author_Institution :
Dept. of Phys. Sci., Osaka Univ., Japan
Abstract :
Various microsensor and microactuators using ferroelectric thin films such as infrared sensors, ultrasonic sensors, piezoelectric actuators and optical switches have been reviewed with the other electronic devices of semiconductor memories and electroluminescent device with low-threshold voltage. A series or technical data for preparing ferroelectric thin films such as PbTiO3, PZT, PLZT and BST by using various methods such as RF sputtering, laser ablation, chemical vapor deposition and the sol-gel method are described. The obtained thin films show very good ferroelectric, pyroelectric, piezoelectric and electro-optic properties
Keywords :
chemical vapour deposition; electro-optical switches; electroluminescent displays; ferroelectric devices; ferroelectric storage; ferroelectric thin films; infrared detectors; laser ablation; microactuators; microsensors; piezoelectric actuators; pyroelectricity; reviews; sol-gel processing; sputter deposition; ultrasonic transducers; BST; BaSrTiO3; CVD; IR sensors; PLZT; PZT; PbLaZrO3TiO3; PbTiO3; PbZrO3TiO3; RF sputtering; US sensors; chemical vapor deposition; electro-optic properties; electroluminescent device; ferroelectric properties; ferroelectric thin films; laser ablation; low-threshold voltage; microactuators; microsensors; nonvolatile semiconductor memories; optical switches; piezoelectric actuators; piezoelectric properties; pyroelectric properties; sol-gel method; Ferroelectric materials; Infrared sensors; Microactuators; Microsensors; Optical films; Piezoelectric films; Semiconductor thin films; Sputtering; Thin film sensors; Transistors;
Conference_Titel :
Micromechatronics and Human Science, 1998. MHS '98. Proceedings of the 1998 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
0-7803-5130-4
DOI :
10.1109/MHS.1998.745747
