Multi-user Integration Chip Service project for MEMS

The research on MEMS (Micro Electro Mechanical Systems) has progressed to the practical development phase. The need for foundries is argued in order to promote MEMS research and development to the practical phase. The multi-chip service is available as the first stage in setting up a MEMS foundry. The multi-chip service has three major benefits: it enable joint access to costly IC process facilities and equipment; it defrays development risks and significantly reduces prototyped fabrication cost; and it encourages young researchers to pursue challenging and innovative ideas without delay. The Multi-user Integrated Chip Service (MICS) was began as a trial by the Micromachine Functional Chip Development Cooperative Research Committee (MMFCC), Institute of Electrical Engineers of Japan in 1997. The Micro-Circuit System (MCS) service was launched in 1997 and the Surface Micromachined Chip (SMC) service in 1998. The High Aspect-ratio Micromachined Chip (HiAMC) is currently working on using a synchrotron radiation light source at Ritsumeikan University. Three issues of great significance have been identified in the development of multi-chip services. The first is the need to compile a set of standardized MEMS design conventions. The second is the need to set up more foundries. The third important issue is the need for expert coordinators and design instructors to supervise all aspects of the process