Floating potential of an isolated macroparticle in vacuum arc deposition plasmas

Author

Junjia, He ; Chun, LIU ; Jiyan, Zou ; Lichun, Cheng

Author_Institution

Dept. of Electr. Power Eng., Huazhong Univ. of Sci. & Technol., Wuhan, China

Volume

2

fYear

2000

fDate

2000

Firstpage

575

Abstract

The vacuum arc deposition (VAD) plasma, as a cathode governed plasma, is not in a local thermal equilibrium state in nature, and the ions emitted from the cathode arc spots characterize high directed velocity in excess of their thermal value. Taking this special feature into account, the charging characteristics of an isolated macroparticle immersed in a VAD plasma are analyzed. The floating potentials of the macroparticles as a result of charging are calculated under thin and thick sheath case

Keywords

cathodes; electric potential; ion emission; plasma CVD; plasma sheaths; vacuum deposition; cathode arc spots; cathode governed plasma; floating potential; isolated macroparticle; local thermal equilibrium state; thermal value; thick sheath; thin sheath; vacuum arc deposition plasmas; Cathodes; Electrons; Nuclear and plasma sciences; Plasma properties; Plasma sheaths; Space technology; Substrates; Surface charging; Vacuum arcs; Vacuum technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Discharges and Electrical Insulation in Vacuum, 2000. Proceedings. ISDEIV. XIXth International Symposium on

Conference_Location

Xi´an

Print_ISBN

0-7803-5791-4

Type

conf

DOI

10.1109/DEIV.2000.879054

Filename

879054