Ion beam focusing by means of plasma oscillations. The set of principal equations and preliminary theoretical studying

Author

Levchenko, I.G.

Author_Institution

Dept. of Robotics, Kharkov State Aerosp. Univ., Ukraine

Volume

2

fYear

2000

fDate

2000

Firstpage

650

Abstract

A new method for surface structure formation such as a regular surface trench system was proposed previously (I.G. Levchenko, 1999). The present paper is concentrated on description of the set of principal equations and some problems of theoretically studying the above problem. The principal possibility of surface structure formation is shown on the basis of studying the ion deflection in undamped plasma oscillations. Special attention was paid to the boundary conditions. According to the two previously proposed modes of deposition, namely transit mode and extraction mode, the two sets of equations and boundary conditions were developed

Keywords

focused ion beam technology; ion beams; plasma oscillations; surface structure; surface treatment; boundary conditions; deposition modes; extraction mode; ion beam focusing; ion deflection; plasma oscillations; principal equations; regular surface trench system; surface structure formation; transit mode; undamped plasma oscillations; Equations; Ion beams; Lenses; Plasma density; Plasma sources; Plasma waves; Substrates; Surface structures; Surface waves; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Discharges and Electrical Insulation in Vacuum, 2000. Proceedings. ISDEIV. XIXth International Symposium on

Conference_Location

Xi´an

Print_ISBN

0-7803-5791-4

Type

conf

DOI

10.1109/DEIV.2000.879074

Filename

879074