A comparative study of computation models for dynamic behaviour of MEMS structures

A comparative study of computation models for predicting the vibration modes of some MEMS structures of cantilever type - as suspension arms of the inertial mass of a bulk-micromachined silicon accelerometer, reported to the experimentally measured values of resonance (natural) frequencies, is presented in this paper. The most appropriate values of silicon Young´s modulus depending on the crystal orientation of the structure and the type of model, including also the dynamic Young´s modulus determined by the authors, have been inferred.