A comparative study of computation models for dynamic behaviour of MEMS structures

Author

Ionascu, G. ; Sandu, A. ; Bogatu, L. ; Comeaga, C.D. ; Manea, E. ; Besnea, D.

Author_Institution

Politeh. Univ. of Bucharest, Bucharest, Romania

Volume

2

fYear

2011

fDate

17-19 Oct. 2011

Firstpage

395

Lastpage

398

Abstract

A comparative study of computation models for predicting the vibration modes of some MEMS structures of cantilever type - as suspension arms of the inertial mass of a bulk-micromachined silicon accelerometer, reported to the experimentally measured values of resonance (natural) frequencies, is presented in this paper. The most appropriate values of silicon Young´s modulus depending on the crystal orientation of the structure and the type of model, including also the dynamic Young´s modulus determined by the authors, have been inferred.

Keywords

Young´s modulus; accelerometers; cantilevers; crystal orientation; elemental semiconductors; micromachining; micromechanical devices; silicon; vibrational modes; MEMS structure; Si; bulk-micromachined silicon accelerometer; cantilever; computation model; crystal orientation; dynamic Young´s modulus; resonance frequencies; silicon Young´s modulus; suspension arms; vibration modes; Computational modeling; Frequency measurement; Micromechanical devices; Numerical models; Resonant frequency; Silicon; Vibrations; MEMS structures; dynamic behavior; resonance (natural) frequency; silicon Young´s modulus;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference (CAS), 2011 International

Conference_Location

Sinaia

ISSN

1545-827X

Print_ISBN

978-1-61284-173-1

Type

conf

DOI

10.1109/SMICND.2011.6095827

Filename

6095827