Title :
Measuring thickness of a thin film conductor using solenoid coil
Author :
Nakane, H. ; Sohara, Y. ; Omori, S.
Author_Institution :
Sci. Univ. of Tokyo, Japan
Abstract :
A method for accurately estimating the thickness of a paramagnetic film conductor from the difference in the complex impedance between a circular solenoid coil equipped with a conductor and a similar one without a conductor has been studied. For aluminum films with a thickness of 15 to 60 mu m in a frequency range of 10 to 500 kHz, the discrepancy between the measured values using this method and those using a micrometer stayed within 3%.<>
Keywords :
aluminium; conductors (electric); electric sensing devices; solenoids; thickness measurement; thin films; 10 to 500 kHz; 15 to 60 micron; Al film; circular solenoid coil; complex impedance; micrometer; paramagnetic film conductor; thin film conductor; Aluminum; Coils; Conductive films; Conductivity; Conductors; Frequency; Impedance; Solenoids; Thickness measurement; Transistors;
Conference_Titel :
Precision Electromagnetic Measurements, 1990. CPEM '90 Digest., Conference on
Conference_Location :
Ottawa, Ontario, Canada
DOI :
10.1109/CPEM.1990.110072
