Title :
Performance optimization of a self-alignment system for capacitive sensors
Author :
van Schieveen, J.P. ; Yang, R. ; Nihtianov, S. ; Spronck, J.W.
Author_Institution :
Mechatron. Syst. Design, Delft Univ. of Technol., Delft, Netherlands
Abstract :
Capacitive sensors are a good choice for sub-nanometer-resolution position measurements, but their performance is dependent on the correct alignment. Therefore, a capacitive sensor with an integrated self-alignment system has been developed which enables the use of capacitive sensors without alignment problems due to mounting and fabrication tolerance.
Keywords :
capacitive sensors; optimisation; position measurement; self-adjusting systems; Matlab; capacitive sensor; commercial application; fabrication tolerance; performance optimization; selfalignment system; subnanometer resolution position measurement; Capacitive sensors; Displacement measurement; Heating; Nickel; Q measurement; Read only memory; Temperature measurement; Self-alignment; capacitive sensor; design; sub-nanometer; thermal actuation;
Conference_Titel :
Mechatronics (ICM), 2011 IEEE International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-61284-982-9
DOI :
10.1109/ICMECH.2011.5971196
