Operation of microfabricated harmonic and ordinary side-drive motors

A variable-capacitance harmonic side-drive motor is presented and the operation of this motor and ordinary variable-capacitance side-drive motors without the need for air-levitation assist is reported. Native oxide formation on motor polysilicon surfaces, resulting from the clamping of the rotor to the shield beneath it, is identified as the cause of motor operational failure. With proper release and testing directed at minimizing this oxide formation, the motors can be readily operated. Operational characteristics of the micromotors, including the role of rotor electric shielding, speed, and frictional effects, are studied. For the side-drive motors, measurements of stopping and starting voltages indicate that the drive torque required to sustain motor operation is 5-7 pN-m, while that required to initiate motor operation after a 30 second rest is nearly twice as high