DocumentCode
2566439
Title
A perturbation method for calculating the capacitance of electrostatic motors
Author
Kumar, Suresh ; Cho, Dan
Author_Institution
Dept. of Mech. & Aerosp. Eng., Princeton Univ., NJ, USA
fYear
1990
fDate
11-14 Feb 1990
Firstpage
27
Lastpage
33
Abstract
This method does not make the assumption of infinite sets of conducting lands to introduce spatial periodicity. The perturbation method is computationally efficient and can be used for any design, including those that use very few repeated sets of conducting lands. The results obtained by this method are compared with previous results which include experimental data. The method is extended to rotary micromotors and to three-dimensional problems
Keywords
capacitance; electric motors; electrostatic devices; machine theory; perturbation theory; small electric machines; capacitance; conducting lands; electrostatic motors; perturbation method; rotary micromotors; three-dimensional problems; Aerospace engineering; Capacitance; Electric potential; Electrostatics; Finite element methods; Integral equations; Micromachining; Micromotors; Perturbation methods; Stators;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location
Napa Valley, CA
Type
conf
DOI
10.1109/MEMSYS.1990.110241
Filename
110241
Link To Document