Title :
A perturbation method for calculating the capacitance of electrostatic motors
Author :
Kumar, Suresh ; Cho, Dan
Author_Institution :
Dept. of Mech. & Aerosp. Eng., Princeton Univ., NJ, USA
Abstract :
This method does not make the assumption of infinite sets of conducting lands to introduce spatial periodicity. The perturbation method is computationally efficient and can be used for any design, including those that use very few repeated sets of conducting lands. The results obtained by this method are compared with previous results which include experimental data. The method is extended to rotary micromotors and to three-dimensional problems
Keywords :
capacitance; electric motors; electrostatic devices; machine theory; perturbation theory; small electric machines; capacitance; conducting lands; electrostatic motors; perturbation method; rotary micromotors; three-dimensional problems; Aerospace engineering; Capacitance; Electric potential; Electrostatics; Finite element methods; Integral equations; Micromachining; Micromotors; Perturbation methods; Stators;
Conference_Titel :
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Napa Valley, CA
DOI :
10.1109/MEMSYS.1990.110241
