Title :
Micromachining and office automation
Author_Institution :
Ricoh Ltd., Tokyo
Abstract :
A brief survey of the role of micromachining in office automation is presented. A size scale of devices and materials used in the office is discussed. It is shown that many vital processes are governed by micromechanisms although the macro scale is inherently determined by the size of paper and the human hand. Two types of microsensors, a multi-axis force sensor and a gas sensor, are presented
Keywords :
electric sensing devices; force measurement; gas sensors; office automation; gas sensor; micromachining; micromechanisms; microsensors; multi-axis force sensor; office automation; Magnetic heads; Magnetic recording; Micromachining; Microsensors; Microstructure; Office automation; Optical arrays; Optical recording; Optical sensors; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Napa Valley, CA
DOI :
10.1109/MEMSYS.1990.110245
