Title :
Ferroelectric thin films
Author_Institution :
Mater. Res. Lab., Pennsylvania State Univ., University Park, PA, USA
Abstract :
Summary form only given. A very wide range of both vapor- and liquid-phase deposition techniques were applied to produce crystalline films of composition in a lead zirconate:lead titanate solid solution system. At compositions close to the morphotropic phase boundary, a regimen which shows excellent piezoelectric properties in the bulk ceramic films with high permittivity (ε33-1350ε 0) at room temperature and large switchable electric polarization (Pr~35 μC/cm2) were fabricated by several groups. Progress toward the use of ferroelectric films, in combination with silicon micromachining, for a wide range of piezoelectric microsensors, micro-actuators and micromotors is reviewed. In view of the very high electric strength alternative electrorestrictive electromechanical coupling appears attractive
Keywords :
dielectric polarisation; dielectric properties of solids; electric actuators; electric strength; ferroelectric thin films; lead compounds; permittivity; piezoelectric transducers; solid solutions; vapour deposited coatings; PbZrO3-PbTiO3; electric strength; electrorestrictive electromechanical coupling; ferroelectric films; liquid-phase deposition techniques; micro-actuators; micromachining; micromotors; morphotropic phase boundary; permittivity; piezoelectric microsensors; piezoelectric properties; solid solution system; switchable electric polarization; vapour-phase deposition techniques; Ceramics; Crystallization; Ferroelectric films; Ferroelectric materials; Permittivity; Piezoelectric films; Solids; Temperature; Titanium compounds; Transistors;
Conference_Titel :
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Napa Valley, CA
DOI :
10.1109/MEMSYS.1990.110251
