• DocumentCode
    2566676
  • Title

    A micro chemical analyzing system integrated on a silicon wafer

  • Author

    Nakagawa, Shigeru ; Shoji, Shuichi ; Esashi, Masayoshi

  • Author_Institution
    Dept. of Electron. Eng., Tohoku Univ., Sendai, Japan
  • fYear
    1990
  • fDate
    11-14 Feb 1990
  • Firstpage
    89
  • Lastpage
    94
  • Abstract
    The fabrication of a three-way valve on a silicon wafer by micromachining techniques is presented. The valve consists of two silicon wafers, a pyrex glass, and a piezoelectric actuator. This three-way valve can control gas flow or liquid flow with voltage applied to the actuator. The liquid flow can be controlled from 0.1 μl /min to 70 μl/min. The results from integrating the three-way valve with a micropump to produce a flow injection analyzing system are discussed
  • Keywords
    electric actuators; elemental semiconductors; flow measurement; silicon; valves; Si; flow injection analyzing system; gas flow; liquid flow; micromachining techniques; micropump; piezoelectric actuator; three-way valve; Chemical analysis; Fabrication; Fluid flow; Glass; Micromachining; Micropumps; Piezoelectric actuators; Silicon; Valves; Voltage control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
  • Conference_Location
    Napa Valley, CA
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1990.110255
  • Filename
    110255
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2566676