Title :
A micro chemical analyzing system integrated on a silicon wafer
Author :
Nakagawa, Shigeru ; Shoji, Shuichi ; Esashi, Masayoshi
Author_Institution :
Dept. of Electron. Eng., Tohoku Univ., Sendai, Japan
Abstract :
The fabrication of a three-way valve on a silicon wafer by micromachining techniques is presented. The valve consists of two silicon wafers, a pyrex glass, and a piezoelectric actuator. This three-way valve can control gas flow or liquid flow with voltage applied to the actuator. The liquid flow can be controlled from 0.1 μl /min to 70 μl/min. The results from integrating the three-way valve with a micropump to produce a flow injection analyzing system are discussed
Keywords :
electric actuators; elemental semiconductors; flow measurement; silicon; valves; Si; flow injection analyzing system; gas flow; liquid flow; micromachining techniques; micropump; piezoelectric actuator; three-way valve; Chemical analysis; Fabrication; Fluid flow; Glass; Micromachining; Micropumps; Piezoelectric actuators; Silicon; Valves; Voltage control;
Conference_Titel :
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Napa Valley, CA
DOI :
10.1109/MEMSYS.1990.110255
