DocumentCode
2566980
Title
Multi-layered electrostatic film actuator
Author
Egawa, Saku ; Higuchi, Toshiro
Author_Institution
Inst. of Ind. Sci., Tokyo Univ., Japan
fYear
1990
fDate
11-14 Feb 1990
Firstpage
166
Lastpage
171
Abstract
A multilayered electrostatic film actuator to realize a high force/weight ratio actuator applicable for large-scale machines is proposed. It has numerous films with plenty of small electrodes stacked and connected. In order to build this structure, an electrostatic actuator named the image charge stepping actuator has been developed. It utilizes image charges induced on a high resistance to produce force. It is fabricated on polymer films and a prototype of the multilayered actuator with four film actuators has been constructed. The fabricated multilayered actuator can produce a force of 0.4 N
Keywords
electric actuators; electrostatic devices; polymer films; force/weight ratio; image charge stepping actuator; image charges; large-scale machines; multilayered electrostatic film actuator; polymer films; Electrodes; Electromagnetic forces; Electrostatic actuators; Fabrication; Large-scale systems; Muscles; Pneumatic actuators; Polymer films; Robots; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location
Napa Valley, CA
Type
conf
DOI
10.1109/MEMSYS.1990.110270
Filename
110270
Link To Document