Title :
Multi-layered electrostatic film actuator
Author :
Egawa, Saku ; Higuchi, Toshiro
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Japan
Abstract :
A multilayered electrostatic film actuator to realize a high force/weight ratio actuator applicable for large-scale machines is proposed. It has numerous films with plenty of small electrodes stacked and connected. In order to build this structure, an electrostatic actuator named the image charge stepping actuator has been developed. It utilizes image charges induced on a high resistance to produce force. It is fabricated on polymer films and a prototype of the multilayered actuator with four film actuators has been constructed. The fabricated multilayered actuator can produce a force of 0.4 N
Keywords :
electric actuators; electrostatic devices; polymer films; force/weight ratio; image charge stepping actuator; image charges; large-scale machines; multilayered electrostatic film actuator; polymer films; Electrodes; Electromagnetic forces; Electrostatic actuators; Fabrication; Large-scale systems; Muscles; Pneumatic actuators; Polymer films; Robots; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Napa Valley, CA
DOI :
10.1109/MEMSYS.1990.110270
