Title :
Imaging with the tunneling and force microscopes
Author_Institution :
Ginzton Lab., Stanford Univ., CA, USA
Abstract :
Two instruments for viewing small structures are reviewed. The theory, construction, and microfabrication of the scanning tunneling microscope and the atomic force microscope are discussed. Some results are included
Keywords :
atomic force microscopy; scanning tunnelling microscopy; atomic force microscope; force microscopes; microfabrication; scanning tunneling microscope; small structures; Atomic layer deposition; Atomic measurements; Instruments; Liquid crystal displays; Microscopy; Probes; Silicon; Surface reconstruction; Tungsten; Tunneling;
Conference_Titel :
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Napa Valley, CA
DOI :
10.1109/MEMSYS.1990.110274
