DocumentCode
2567109
Title
Imaging with the tunneling and force microscopes
Author
Quate, C.
Author_Institution
Ginzton Lab., Stanford Univ., CA, USA
fYear
1990
fDate
11-14 Feb 1990
Firstpage
188
Lastpage
191
Abstract
Two instruments for viewing small structures are reviewed. The theory, construction, and microfabrication of the scanning tunneling microscope and the atomic force microscope are discussed. Some results are included
Keywords
atomic force microscopy; scanning tunnelling microscopy; atomic force microscope; force microscopes; microfabrication; scanning tunneling microscope; small structures; Atomic layer deposition; Atomic measurements; Instruments; Liquid crystal displays; Microscopy; Probes; Silicon; Surface reconstruction; Tungsten; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location
Napa Valley, CA
Type
conf
DOI
10.1109/MEMSYS.1990.110274
Filename
110274
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