Title :
Positioning and measurement using a crystalline lattice reference scale-a feasibility study of STM application to MEMS
Author :
Kawakatsu, Hideki ; Hoshi, Yasuo ; Kitano, Hitoshi ; Higuchi, Toshiro
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Japan
Abstract :
A regular crystalline lattice is proposed for use as a universal reference scale for positioning and measurement of micro-electro-mechanical systems (MEMS). The metrological application of crystalline lattice is investigated by using a dual tunneling-unit scanning tunneling microscope (DTU STM), which can observe two crystalline surfaces at once using a single lateral XY scanner. The basic ideas of positioning and measurement using a crystal as a scale are introduced. The method of lateral tip servo control to realize position lock over an atom are discussed. The structure of the DTU STM and a rough positioning mechanism for a coarse-tip approach driven by an impact force are introduced
Keywords :
position control; scanning tunnelling microscopy; servomechanisms; MEMS; STM application; coarse-tip approach; crystalline lattice reference scale; dual tunneling-unit scanning tunneling microscope; impact force; lateral tip servo control; micro-electro-mechanical systems; positioning; single lateral XY scanner; Crystallization; Lattices; Microelectromechanical systems; Micromechanical devices; Microscopy; Position measurement; Rough surfaces; Servosystems; Surface roughness; Tunneling;
Conference_Titel :
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Napa Valley, CA
DOI :
10.1109/MEMSYS.1990.110276
