Title :
Direct coupling system between nanometer world and human world
Author :
Hatamura, Yotaro ; Morishita, Hiroshi
Author_Institution :
Dept. of Mech. Eng. for Production, Tokyo Univ., Japan
Abstract :
A nanomanipulator system, called the nanorobot system, which allows humans to experience the nanometer world with their own sensitivities is proposed. The nanorobot system consists of left and right hand robots with highly sensitive force sensors in the chamber of stereo scanning electron microscope (SEM) which gives three-dimensional magnified image of the process site. A prototype of the nanorobot system is described. The effectiveness of the prototype system is demonstrated by the production of a microswitch in an aluminum substrate
Keywords :
electric sensing devices; robots; scanning electron microscopes; Al; force sensors; left hand robots; microswitch; nanomanipulator system; nanorobot system; right hand robots; stereo scanning electron microscope; three-dimensional magnified image; Assembly; Force sensors; Humans; Machining; Manufacturing processes; Mechanical engineering; Production systems; Prototypes; Robot sensing systems; Semiconductor device manufacture;
Conference_Titel :
Micro Electro Mechanical Systems, 1990. Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Napa Valley, CA
DOI :
10.1109/MEMSYS.1990.110277
