DocumentCode
2567310
Title
Plasma Dens1ty Measurement of the HG-AR (1 TORR) by LIF Method
Author
Yang, J.K. ; Lee, Jong Chul ; Park, D.H.
Author_Institution
Wonkwang Univ., Ihksan
fYear
2005
fDate
20-23 June 2005
Firstpage
133
Lastpage
133
Abstract
Summary form only given. In this paper, we introduced LIF measurement method and summarized the theoretical side, and when the wavelength of laser and electric power, lamp applied electric power are changed, we measured relative density of metastable state in mercury with observing a laser induced fluorescence signal of 404.8 nm and 546.2 nm, and confirmed the horizontal distribution of plasma density in discharge lamp. Because the generation, the extinction of atoms in metastable state happen by collision, ionization, excitation between plasma particles, density and distribution of metastable state depend on each energy and density of plasma particles intensely. In this meaning, It is important that we measure density distribution in plasma electric discharge mechanism study. The results that confirmed resonance phenomenon about energy level of atoms along wavelength change, we confirmed the largest fluorescent signal in 436 nm, and density of atoms in 546.2 nm (63S1rarr63P2) were larger than 404.8 nm (63S1rarr63P1). According to increase of lamp applied electric power, plasma density increased, too. When increased with laser electric power, LIF signal reached saturation state in a more than 2.6 mJ. When measured partial plasma density distribution along a horizontal axis by using the laser induced fluorescence method, the density decreased by recombination as away from the center
Keywords
argon; discharges (electric); ionisation; mercury (metal); metastable states; plasma collision processes; plasma density; plasma diagnostics; 1 torr; 404.8 nm; 546.2 nm; Hg-Ar; atom extinction; discharge lamp; energy level; ionization; laser induced fluorescence; metastable state density; plasma density measurement; plasma electric discharge; plasma particle excitation; Atomic measurements; Density measurement; Electric variables measurement; Fluorescence; Metastasis; Plasma density; Plasma measurements; Plasma waves; Power lasers; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2005. ICOPS '05. IEEE Conference Record - Abstracts. IEEE International Conference on
Conference_Location
Monterey, CA
ISSN
0730-9244
Print_ISBN
0-7803-9300-7
Type
conf
DOI
10.1109/PLASMA.2005.359107
Filename
4198366
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