Microfabricated 220 GHz, 50W SERPENTINE waveguide amplifier using novel UV-LIGA beam tunnel technique

A 220 GHz, 50 W vacuum electron serpentine waveguide amplifier is under development utilizing an 11.7 kV, 120 mA electron beam. The amplifier showcases a novel microfabrication technique employing embedded polymer monofilaments to simultaneously fabricate the circuit and beam tunnel in a single UV-LIGA step [1] (U.S. Provisional Patent Application filed). The method shows promise for fabricating beam tunnels and circuits into the THz range. The cold testing of the circuit and window is being carried out at the U.S. Naval Research Laboratory, where the circuit is also being fabricated.