The Investigation to Partial Electricity Parameters of Atmospheric Pressure Dielectric Barrier Discharge and its Application to Materials Processing

Summary form only given. Recently, the dielectric barrier discharge (DBD) plasma at atmospheric pressure has become higher and higher with its ever-increasing applications to material processing. The DBD plasma source at an improved quasi-stable atmospheric pressure is achieved when discharge voltage, discharge current, and gap between the electrodes are carefully controlled. In this paper, this plasma source has been used to modify the surface of materials. The relationships among those electricity parameters, such as discharge current and discharge power, which is measured by Lissajous figure of the oscilloscope, were analyzed by using improved DBD equipment. The variation of plasma discharge current following the change of discharge gaps indicates an existence of critical gap distance. When the gap between electrodes is less than that the critical gap, a quasi-stable atmospheric pressure DBD plasma source can be achieved after carefully controlled discharge voltage and current. The experimental results indicate that discharge gaps, working gas and the rate of flow all have influence on these electricity parameters. The result is of great importance to DBD at atmospheric pressure and its application to material processing