Tspectral Diagnosis of Dielectric Barrier Discharge at Atmospheric Pressure

Summary form only given. The dielectric barrier discharge (DBD) is characterized by the presence of at least one insulating layer in contact with the discharge between two planar or cylindrical electrodes connected to an AC power supply. The main advantage of this type of electrical discharge is that non-equilibrium plasma conditions in atmospheric-pressure gases can be maintained in an economic and reliable way. This has led to a number of important applications including industrial ozone generation, plasma-chemical vapor deposition, pollution control, excitation of CO₂ lasers, excimer lamps, and most recently, large-area flat plasma-display panels, in which extensive work in material processing has been done successfully. In this paper, the spectral lines of plasma emission at atmospheric pressure were recorded by using a grating spectrograph and all signals will be sent to the computer directly and immediately for data processing and analysis during the experiment. The purpose of the study is to control the process of materials´ surface modification promptly. The experimental results indicate that a critical discharge gap is an important parameter to improve the quality of materials processing, and spectral diagnosis has been proved a workable method by choosing a suitable discharge gap. The result is of great importance to DBD at atmospheric pressure and its application to materials processing