Title :
A 4.5mW Closed-Loop /spl Delta//spl Sigma/ Micro-Gravity CMOS-SOI Accelerometer
Author :
Babak Vakili Amini ; Reza Abdolvand ; Farrokh Ayazi
Author_Institution :
Georgia Inst. of Technol., Atlanta, GA
Abstract :
A force-rebalanced high-order DeltaSigma micro-g accelerometer has been implemented in CMOS-SOI. The measured acceleration resolution is 4mug/radicHz, which is equivalent to a capacitive resolution of 2aF with a dynamic range of 95dB at 20Hz (resolution BW=3Hz). Measured sensitivity is 5pF/g (gain of 30V/g). The IC consumes 4.5mW from a 3V supply and uses 2.25mm2
Keywords :
CMOS integrated circuits; accelerometers; delta-sigma modulation; silicon-on-insulator; 3 V; 4.5 mW; acceleration resolution; closed-loop DeltaSigma accelerometer; force-rebalanced; micro-gravity CMOS-SOI accelerometer; Acceleration; Accelerometers; Application software; Dynamic range; Force feedback; Gravity; Integrated circuit noise; Noise measurement; Portable computers; Vibration measurement;
Conference_Titel :
Solid-State Circuits Conference, 2006. ISSCC 2006. Digest of Technical Papers. IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
1-4244-0079-1
DOI :
10.1109/ISSCC.2006.1696155
