A low noise CMOS charge sensitive preamplifier for MEMS capacitive accelerometer readout

Author

Chen, Jianghua ; Ni, Xuewen ; Mo, Bangxian

Author_Institution

Peking Univ., Beijing

fYear

2007

fDate

22-25 Oct. 2007

Firstpage

490

Lastpage

493

Abstract

This paper describes a low noise CMOS charge sensitive preamplifier for MEMS capacitive accelerometer readout circuit. This structure utilizes a feedback capacitance and switch´s technique to cancel the input parasitic capacitance and the offset voltage, and also uses an optimized noise input buffer stage to reduce low frequency noises, especially the flicker noise without increasing the complexity of the proposed circuit. The simulation result of the proposed circuit shows that an average noise reduction of 94% at low frequencies has been achieved compared with conventional folded cascode differential amplifier. The root mean square equivalent input noise is 4.0 nV/rtHz at 1 kHz.

Keywords

CMOS integrated circuits; accelerometers; capacitive sensors; low noise amplifiers; microsensors; preamplifiers; readout electronics; MEMS capacitive accelerometer; feedback capacitance; flicker noise reduction; low noise CMOS charge sensitive preamplifier; optimized noise input buffer stage; readout circuit; switch technique; 1f noise; Accelerometers; Circuit noise; Low-frequency noise; Micromechanical devices; Noise cancellation; Noise reduction; Parasitic capacitance; Preamplifiers; Switching circuits; CMOS; MEMS accelerometer; analog integrated circuits; charge sensitive; low noise; preamplifier; readout circuit;

fLanguage

English

Publisher

ieee

Conference_Titel

ASIC, 2007. ASICON '07. 7th International Conference on

Conference_Location

Guilin

Print_ISBN

978-1-4244-1132-0

Electronic_ISBN

978-1-4244-1132-0

Type

conf

DOI

10.1109/ICASIC.2007.4415674

Filename

4415674