Title :
Modal parameter identification of a MEMS gyroscope
Author :
M´Closkey, Robert T. ; Gibson, Steve ; Hui, Jason
Author_Institution :
Dept. of Mech. & Aerosp. Eng., California Univ., Los Angeles, CA, USA
Abstract :
This paper reports the experimental system identification of the Jet Propulsion Laboratory microelectromechanical (MEMS) vibrational rate gyroscope. A high-order two-input/two-output transfer function for the microgyroscope is identified and mapped to a three-mode rigid plate model that reveals the orientation of important vibrational modes
Keywords :
gyroscopes; microsensors; parameter estimation; transfer functions; vibration measurement; JPL; Jet Propulsion Laboratory MEMS vibrational rate gyroscope; MIMO transfer function; experimental system identification; high-order two-input/two-output transfer function; microelectromechanical vibrational rate gyroscope; microgyroscope; modal parameter identification; three-mode rigid plate model; vibrational mode orientation; Aerospace engineering; Calibration; Electrodes; Gyroscopes; Laboratories; Micromechanical devices; Microsensors; Parameter estimation; Propulsion; Transfer functions;
Conference_Titel :
American Control Conference, 2000. Proceedings of the 2000
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-5519-9
DOI :
10.1109/ACC.2000.879491
